Home | Applications | Integration With Probe Station
Direct thermal conditioning at the DUT while maintaining probe access and precise stage positioning.
Purpose:
Enable reliable electrical probing of DUTs or quarter wafers under precise and stable thermal conditions using the RH Thermal Head inside a prober station environment.
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Key elements:
Microscope
Alignment and inspection of the DUT.
DUT / Quarter Wafer
Placed on the RH Thermal Head for thermal conditioning.
RH Thermal Head
Provides controlled temperature directly to the DUT.
Probe Stage
Supports the thermal head and enables precise positioning.
Microscope
For alignment and
inspection of the DUT
DUT / Quarter Wafer
Placed on the RH Thermal
Head for thermal
conditioning
RH Thermal Head
Provides controlled
temperature to the DUT
Prober Stage
Supports the thermal head and enables precise positioning
Ask our application team for consultation
to define the correct thermal head, adapter, fixture, and prober integration approach.